Ultra-precision wafer positioning by six-axis micro-motion mechanism.
نویسندگان
چکیده
منابع مشابه
Practical control method for ultra-precision positioning using a ballscrew mechanism
This paper describes a practical control method for nanometer level point-to-point positioning (PTP) using a conventional ballscrew mechanism. nominal characteristic trajectory following controller (NCTF controller) is used for the ultra-precision positioning. The controller design, which s comprised of a nominal characteristic trajectory (NCT) and a PI compensator, is free from exact modeling ...
متن کاملSimple and Practical Control Method for Ultra- Precision Positioning - Application to a Ballscrew Mechanism
INTRODUCTION Precision positioning systems are essential in precision industry. These positioning systems often have one or more elements that introduce friction. Friction is well known to cause steadystate errors and limit cycles, and to slow the motion of the mechanism. Thus, it is important to consider friction compensation in controller design. Simple controllers like PID controllers do not...
متن کاملPrecision Motion Control of Linear Motor Drive Systems for Micro/nano-positioning
Micro and Nano-technologies need precision machines that can produce motion accuracy down to micro/nano-meter range. At the same time, these machines have to operate at high speeds to yield high productivity. Such an increasingly tight control performance requirement puts a significant challenge to control community and forces control engineers to look beyond traditional linear control theory f...
متن کاملPrecision Analysis of a Class of Large Displacement Parallel Mechanism for Micro/nano Positioning Applications
Since micro/nano positioning devices are increasingly being made of parallel manipulators due to their characteristics, the precision analysis of a class of parallel platform for micro/nano positioning applications is proposed in this paper. The kinematics model of the dual parallel mechanism system is established via the stiffness model of individual wide-range flexure hinge and then the resul...
متن کاملDevelopment of Ultra Precision Machining with High Positioning Resolution
INSTRUCTIONS The technology for ultra-precision machining has been developed rapidly and steadily. In recent years, the demand for free form, complex and microscopic cutting has increased as a result of the need for highvalue-added fabrication for items such as high NA glass lenses, micro-grooves, diffractive aspheric lenses and other optical components. The ultra-precision machine for cutting ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1990
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.56.1094